
Glass Panel Cleaning System ultrasonically removes glass
fines, fingerprints, and various other
industrial or incidental contamination from
panel surfaces. Interlab’s DI recirculation
system allows critical rinsing using hot,
ultra-pure water, prior to
capillary drying and evaporative drying
stages.
Systems can be custom sized as appropriate
for FPD size and throughput requirements.
Features of the cleaning process are similar
to those described in our
Soniscan® page. Also note that our
large-scale
rinser/dryer systems may be an ideal
adjunct for delivering high-purity final
stages of any existing wet process.
Glass cleaning operations can be undertaken
for incoming stock panels, or at various
stages of production, including pre-epitaxy,
or as necessary during microlithographic
operations.