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►Flat Panel Displays     ▪ Photoresist Strip

 

Interlab’s stainless steel and plastic wet process benches can be custom built to any size required for a particular work piece. The system shown accommodates batched workloads of FPD’s up to 14”x16”.

The process incorporates Interlab’s semiconductor-grade solvent tanks, with rounded, cove-corner construction to prevent aggregate contamination accumulating in corners, as can happen with square-cornered tanks. Tanks are internally electropolished, and fitted with overflow weirs to allow thorough fluid turnover through the filtered recirculation loop. The process also includes dump-rinsing, a hot DI final rinse with capillary drying, and a filtered evaporative final dryer.

The fully automated system uses a front-mounted robotic hoist to save on space and allow maintenance access to the robotics with no rear access required. Process area is fully enclosed within the fume exhaust hood and soft-wall plastic face shield. Intrinsically-safe versions are available.