
Interlab’s stainless steel and plastic wet process benches
can be custom built to any size required for
a particular work piece. The system shown
accommodates batched workloads of FPD’s up
to 14”x16”.
The process incorporates Interlab’s
semiconductor-grade solvent tanks, with
rounded, cove-corner construction to prevent
aggregate contamination accumulating in
corners, as can happen with square-cornered
tanks. Tanks are internally electropolished,
and fitted with overflow weirs to allow
thorough fluid turnover through the filtered
recirculation loop. The process also
includes dump-rinsing, a
hot DI final rinse with capillary
drying, and a filtered evaporative final
dryer.
The fully automated system uses a
front-mounted robotic hoist to save on space
and allow maintenance access to the robotics
with no rear access required. Process area
is fully enclosed within the fume exhaust
hood and soft-wall plastic face shield.
Intrinsically-safe versions are available.