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Photoresist Stripping System

Interlab manufactures all-stainless-steel systems for use with organic solvents, combustibles, and flammables. Flammable solvent benches are fully compatible with applicable NEC codes. CE and UL certification is also available.

Custom systems may be designed for any specified process configuration, and wafer size/quantity. Stainless tanks feature rounded cove corners, and single, dual, or 4-sided overflow weirs. Cooling, heating, and various fully automatic process functions are available.

As with our corrosives systems, we manufacture simple manual benches, or fully automatic benches with robotic handling and sophisticated control software.