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Etching

Interlab manufactures corrosive-compatible systems for pre-diffusion cleaning, pattern etching, RCA cleaning, and chemical finishing. As a custom manufacturer, we provide fully automated versions or manual benches, with any type of process configuration, hood configuration, or wafer handling arrangement.

Automated versions employ our field proven non-contaminating robotics. By isolating the robotic transfer mechanical components behind the protective process backwall, we achieve not only extraordinary reliability, but unparalleled ease of maintenance.

In addition to our own process vessels, dump-rinsers, dryers, etc., Interlab can incorporate outside vendor components such as may be desired for a customer’s application, including megasonics, IPA or Marangoni dryers, or spin/rinse/dryers. Chemical delivery, automatic drain and top-up, and sophisticated process monitoring, control, and data handling provisions are available.